Abstract
We prepared gold thin films on smooth Si/SiO2 substrates by electron cyclotron resonance plasma spattering method. The films deposited on Si substrates were investigated by FE-SEM and UV-vis spectrophotometer. The transition from discontinuous films to continuous films was discussed. Optical extinction at normal incidence were measured for the gold thin films deposited on SiO2 substrates. As the deposition time increased, the magnitude of red-shift of local surface plasmon resonance (LSPR) peak was enhanced compared to general gold nanoparticles. We discussed the relation between the shapes of particles and the shift of LSPR wavelength by comparing to the FDTD calculations.
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