Abstract
OS2401 次世代半導体チップにおける微細構造領域の熱伝導特性と力学的変形特性(OS24-1 三次元積層半導体チップにおけるシリコン貫通ビア/微細金属接合技術と強度信頼性,OS-24 三次元積層半導体チップにおけるシリコン貫通ビア/微細金属接合技術と強度信頼性)
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