Abstract
In this study, we intend to develop three-dimensional (3-D) piezoelectric micro power generation devices using a 3-D ceramics molding process based on microstereolithography. In this method, high concentration slurry of piezoceramic nanoparticles is introduced into 3-D polymeric mold fabricated by microstereolithography, and then the polymeric mold is thermally decomposed. After sintering of green body, any 3-D ceramics microstructures can be produced. In experiments, we fabricated piezoelectric spiral elements using slurry of BaTiO_3 nanoparticles. After polarization treatment of the piezoelectric element, we confirmed that they could generate output voltage by applying multidirectional loads. In the near future, 3-D piezoelectric elements will be useful for highly-efficient energy harvesting devices by optimizing the 3-D shapes.
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