Abstract
Parylene C is an inert, hydrophobic, flexible and biocompatible polymer coating material, which has recently found broad MEMS and BioMEMS applications including microstructures, micro sensors and actuators. As a result, many researches have been conducted by focusing on the utilization of Parylene C thin films. Little attention, however, was paid to and rare was known about the mechanical properties of the thin films that may subject to severe tension, bending, twisting or the combination of these loading, especially in biomedical implants in which strength reliability must be secured during a reasonable lifetime. The objective of the present study, therefore, is to investigate the tensile properties of Parylene C thin films fabricated by micromachining process in the range of thickness from submicron to tens of microns. The effect of sample thickness is discussed.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
More From: The Proceedings of the Materials and Mechanics Conference
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.