OS05W0267 Evaluation of local work affected layer based on magnetic domain analysis using magnetic force microscopy

Abstract

This paper deals with the evaluation method of the local work affected layer based on the magnetic domain analysis using a magnetic force microscope (MFM). The fine maze magnetic domain pattern is observed on the lapped ferrite (111) plane. The maze domain pattern becomes coarser by increasing the etched depth of affected surface layer. The area percentage of magnetic domain pattern in the whole lapped surface decreases with an increase of the etched depth and the magnetic domain pattern disappears when the etched depth exceeds about 1μm. This critical value in the etched depth is almost equal to the work affected layer depth, evaluated from electron diffraction analysis. These results show that the magnetic domain imaging method by the MFM becomes a useful technique for evaluating the local work affected layer.