Abstract

In this article, we report that the origins of 1/f noise in pm-Si:H film resistors are inhomogeneity and defective structure. The results obtained are consistent with Hooge's formula, where the noise parameter, αH, is independent of doping ratio. The 1/f noise power spectral density and noise parameter αH are proportional to the squared value of temperature coefficient of resistance (TCR). The resistivity and TCR of pm-Si:H film resistor were obtained through linear current-voltage measurement. The 1/f noise, measured by a custom-built noise spectroscopy system, shows that the power spectral density is a function of both doping ratio and temperature.

Highlights

  • Nanostructure semiconductor has been the focus of intense interest in recent years due to their extensive device application [1,2,3,4,5,6]

  • The results of this study demonstrated that the origins of 1/f noise in nanostructure inclusion pm-Si:H are the inhomogeneity and the defective structure in the films

  • The power spectral density of 1/f noise is inversely proportional to boron doping ratio, which is consistent with Hooge’s formula

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Summary

Introduction

Nanostructure semiconductor has been the focus of intense interest in recent years due to their extensive device application [1,2,3,4,5,6]. Gas doping ratio; h, film thickness (nm); NC, total number of carriers; TCR value-b (%), TCR = 1/R*(dR/dT)*100; resistivity at temperature of 300 K-R0 (MΩ); XC, crystal volume fraction (%); H, hydrogen content (%); void, void volume fraction (%).

Results
Conclusion
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