Abstract

In this paper, we report the electrical characteristics of thin active layer indium–gallium–zinc-oxide thin-film transistors (IGZO TFTs) having an asymmetric dual gate structure. It was observed that the performance of IGZO TFTs significantly improved when the TFT is operated in the dual gate mode though the performance of the top gate mode shows very poor performance of low field-effect mobility and large subthreshold slope. We found that the channel electrons are coupled in the bulk region when the active layer is very thin, and top gate biasing provides additional electrons to the coupled channel region, which improves the electrical performance of dual gate mode IGZO TFTs. Bias stress instability measurements also indicate that dual gate mode IGZO TFTs show better stability compared to the other mode because coupled electrons are mainly formed in the bulk region, which reduce the effect of interfacial defect density of states. Therefore, the improvements of performance of dual gate electrode IGZO TFTs can be realized regardless of the relatively poor performance of the top gate mode.

Highlights

  • In this paper, in order to explain the peculiar observation, thin active layer amorphous IGZO TFTs having asymmetric performance of the dual gate structure were fabricated and their electrical properties were characterized

  • It was observed that the electrical parameters such as field-effect mobility, subthreshold slope (SS), and threshold voltage and the stabilities of the IGZO TFTs were improved only when the IGZO TFTs were operated in scitation.org/journal/adv the dual gate mode regardless of the poor performance of the top gate mode

  • The two different annealing temperatures of median and high temperatures were chosen for comparison of the electrical characteristics depending on interfacial states because the amount of interfacial states is inversely proportional to the annealing temperature

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Summary

Introduction

In order to explain the peculiar observation, thin active layer amorphous IGZO TFTs having asymmetric performance of the dual gate structure were fabricated and their electrical properties were characterized.

Results
Conclusion
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