Abstract
AbstractIn—situ cleaning of Si surfaces in vacuum was successfully performed using excited hydrogen and it was applied to epitaxial growth of SrTiO3 films on Si(100) substrates. Epitaxial growth of SrTiO3 films was observed under optimum cleaning conditions, however, the epitaxial nature was found to be destroyed for films thicker than 50 nm, which is probably due to the non—stoichiometry of the films. The electrical properties of the initially epitaxial SrTiO3 films grown on the cleaned Si substrates were better than those of polycrystalline ones.
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