Abstract
SrTiO3 and MgTiO3 thin films were grown by vapor−solid reactions on TiO2 (rutile) single crystals with different surface orientations. The crystallographic relations between the product phases and the TiO2 substrates were studied by X-ray diffractometry (XRD) and transmission electron microscopy. XRD pole figure analysis revealed more than one orientation relationship for SrTiO3 depending on deposition temperature. All observed orientations have a common [11̄0] SrTiO3 ∥ [001] TiO2 tilt axis. Alternatively, a topotaxial formation of MgTiO3 on the rutile crystals was found. The crystallographic relationships between the reaction products and the TiO2 substrates and their origins as well as the role of crystallography for first phase selection are discussed.
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