Abstract
Epitaxial tetragonal PZT films with (100)/(001) and (110)/(101) and (111) orientations were grown on various kinds of single crystal substrates having different thermal expansion coefficient. Volume fractions of (001) and (101) orientations in respective (100)/(001)- and (110)/(101)-oriented films were almost linearly increased with increasing thermal strain of the films that was generated under the cooling process after the deposition from the growth temperature to the Curie temperature. Perfectly (001)- and (101)-oriented films were grown on (111) CaF2 substrates with large thermal expansion coefficient. Observed saturation polarization values linearly changed with the volume fractions of (100) and (101) orientations.
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