Abstract
The orientation and substructure of rutile films obtained by oxidation of oriented Ti films are investigated by transmission electron microscopy and high-energy electron diffraction. It is shown that the textures of the oxide are defined by the textures of the initial metal film. A set of orientation relations between the crystal lattices of titanium and rutile is established, and the optimal orientation relation is determined. The dislocation substructure of the high-angle 90° boundaries in TiO2 films is revealed. The size and orientation mismatch at this boundary is compensated by the grain boundary lattice dislocations.
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