Orientation Analysis by Computer-Aided Diffraction Pattern Matching in The TEM

Abstract

Electron diffraction patterns taken in transmission electron microscopes are widely used for phase identification and orientation determination of crystallites as small as hundreds or even tens of nanometers in size. The analyses typically require rather tedious measurement of the patterns, and matching of calculated d-spacings and angles with those of known phases. Recently, the analysis of these patterns has been facilitated by powerful desktop computer programs that use digitally captured images for on-line measurement and simulation matching of" the diffraction spot and Kikuchi line patterns. This presentation will illustrate an application of computer-aided pattern simulation and matching for precise determination of crystal orientations.Two experimental TV camera arrangements were used to record diffraction patterns in a TEM. These included a cooled-CCD camera located on the electron optical axis below the microscope viewing chamber, and a simple TV-rate CCD that recorded directly from the inclined fluorescent viewing screen of the microscope.