Abstract
Organosulfide Inhibitor Instigated Passivation of Multiple Substrates for Area-Selective Atomic Layer Deposition of HfO<sub>2</sub>
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https://doi.org/10.1021/acs.chemmater.3c02525
Copy DOIJournal: Chemistry of Materials | Publication Date: Feb 22, 2024 |
Organosulfide Inhibitor Instigated Passivation of Multiple Substrates for Area-Selective Atomic Layer Deposition of HfO<sub>2</sub>
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