Abstract

We have developed a new organic thin film fabrication process, which makes use of laser ablation followed by photochemical reaction using excimer laser. In this study, we investigated the conditions for good organic films formation such as laser fluence, substrate temperature, using stoichiometrically equivalent mixture of terephthaloylchloride and p-phenylenediamine as ablation source. It was shown that thin organic polymer films were formed under the conditions where laser fluence 20-310mJ/cm 2 and substrate temperature 200-300°C through FT-IR characterization.

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