Organic thermal and electrostatic ciliary microactuator array for object manipulation

Abstract

An organic thin-film ciliary microactuator array using independent thermal and electrostatic actuation is described. A polyimide thermal bimorph structure provides for large angle deflection with high load capacity. Electrostatic electrodes provide low-power hold-down, capacitive sensing, and feedback control capabilities. Integrating four orthogonally oriented actuators into a unit cell and replicating this cell into an array allows for precise movement of small objects in arbitrary directions. The ciliary microactuator array has immediate applications for positioning, alignment, inspection, and assembly of small parts, such as IC dice, with micron-scale resolution.