Abstract

In the last few years static secondary ion mass spectrometry (SSIMS) has proved to be a versatile and indispensable method for determining the composition and the structure of the outermost molecular layers of a surface. In particular when using a high-resolution time-of-flight (TOF) mass analyser a high sensitivity can be obtained with SSIMS. In this review it will be shown that the analysis of surfaces with a well-defined chemical structure by means of SSIMS has given detailed insight into the relation between the structure of the fragment ions formed by ion bombardment of the surface and the original surface structure. These studies have also improved the possibilities for quantifying the SSIMS results. In addition, the better knowledge about the ionformation process can be used for the analysis of surfaces of unknown composition and structure. Finally, some recent applications of SSIMS will be presented.

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