Abstract

In this study, the SiO polymer coating film was prepared the containing tetraethyl orthosilane (TEOS) solution by the sol-gel method on soda lime glass. After then, the plasma polymer coating was deposited on SiO polymer coated glass by plasma enhanced chemical vapor deposition (PECVD) method at room temperature during 15 seconds. The thiophene monomer was used as organic precursor. It was heat up to 60 oC and bubbled with hydrogen gas which flow rate was 50 sccm. Plasma was ignited by radio frequency (RF, 13.56 MHz) and its power was 10 W. SiO polymer and plasma polymer coated SiO polymer films were investigated by Fourier Transform Infrared (FT-IR), scanning electron microscopy (SEM), ultraviolet-visible (UV-Vis.), water contact angle, the adhesion test, and the pencil hardness test. The IR spectra shows evidence of very thin organic plasma polymer, which could not be measured by SEM cross image. The SEM images show that the morphology of each film was not changed by plasma polymer coating. Low water contact angles showed with both coating. Moreover surface hardness was increased by plasma polymer coating.

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