Organic analytes sensitivity in meso-porous silicon electrical sensor with front side and backside contacts

Abstract

Chemical sensors fabricated from porous silicon (PSi) for liquid organic analytes (ethanol, acetonitrile, methanol and acetone) are demonstrated, with an emphasis on the impact of the Ag electrical contact placement on sensor performance. Sensors with front side contact display larger shift in capacitance response (2–3 times more sensitive) compared to the backside sensor design as the solvents immediately interact with the pore openings before infiltration. Much slower response time (7–30 min range) for front side vs. (50–200 s scale range) for backside configuration is observed. Both sensor designs exhibit excellent solvent infiltration-evaporation reversible response, indicating no chemical reaction or surface modification occurred. The response time was in the order of ethanol>acetonitrile>methanol>acetone, which correlates well with the solvent vapor pressure. The capacitance shift in both sensor devices is likely related to the interface interaction, revealing a closer correlation with the dipole moments of solvents. This is supported by the photoluminescence quenching upon exposure to organic solvents, with a relative intensity decrease tracks with the dipole moment. The sensitivity remains sufficiently high during the repeated use, with excellent storage stability for backside contact. This comparative study suggests the viability of the current sensor structure and design particularly with backside contact for sensing of various chemical analytes with notably sensitivity and extremely rapid response.