Abstract
Thin film composition spreads of Mg–Ni were deposited by co-sputtering on micromachined Si-cantilevers. The investigated compositions range from about Mg 60Ni 40 to about Mg 80Ni 20. Structural properties as well as mechanical stress before and after hydrogenation were measured with X-ray diffraction (XRD) and laser profilometry, respectively. The composition spreads were hydrogenated in a special pressure vessel, which allows measuring optically the hydrogen-induced deflection (stress-change) of 16 cantilevers as a function of hydrogen pressure and/or temperature. It was found that the hydrogen-induced stress is correlated with the composition and microstructure of the films. Highest hydrogen-induced stress changes were found for compositions close to the crystalline Mg 2Ni phase.
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