Abstract
TiO2 thin films were deposited by reactive magnetron sputtering with increasing thickness T1, T2, T3 and T4. The μ-Raman spectra showed the presence of anatase TiO2 in all films. The phonon confinement model revealed the crystallite size ranging between 5.1 and 6.1 nm. The optical gap energy was found to decrease from 3.45 eV to 3.37 eV. Scanning electron microscopy and energy dispersive X-ray spectroscopy analysis showed enhancement of crystallinity and stoichiometry over the films’ thickness in accordance with the μ-Raman measurements. The m-lines spectroscopy confirmed the normal behavior of the films as multimode waveguides by the increase of propagation modes’ number with the films’ thickness for each transverse electric and transverse magnetic polarization. Both ordinary and extraordinary refractive indices decreased over the films’ thickness. The birefringence however had an opposite behavior. The cut-off thickness experienced an increment as a function of thickness. In comparison, m-lines and Swanepoel’s method were relatively compatible.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
