Abstract
Miniaturized optogalvanic spectroscopy (OGS) shows excellent prospects for becoming a highly sensitive method for gas analysis in micro total analysis systems. Here, a status report on the current development of microwave-induced microplasma sources for OGS is presented, together with the first comparison of the sensitivity of the method to conventional single-pass absorption spectroscopy. The studied microplasma sources are stripline split-ring resonators, with typical ring radii between 3.5 and 6 mm and operation frequencies around 2.6 GHz. A linear response (R2 = 0.9999), and a stability of more than 100 s are demonstrated when using the microplasma source as an optogalvanic detector. Additionally, saturation effects at laser powers higher than 100 mW are observed, and the temporal response of the plasma to periodic laser perturbation with repletion rates between 20 Hz and 200 Hz are studied. Finally, the potential of integrating additional functionality with the detector is discussed, with the particular focus on a pressure sensor and a miniaturized combustor to allow for studies of solid samples.
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