Optofluidic microsystem for on-chip L2-waveguide modulation featuring flow stabilization and a novel input coupling region

Abstract

We present an optofluidic microsystem integrated onto a single device featuring on-chip light guiding and positioning under stable and low-loss conditions. Integration of optical components onto a microfluidic chip offers numerous new possibilities in the field of particle and cell analysis, but reconfigurable on-chip light positioning is still one of the major challenges. The recently developed device is built up as a liquid-core/liquid-cladding waveguide which enables versatile adjustment possibilities. Provided with a new input coupling region, the coupling efficiency was improved and straight light guidance could be ensured. Five liquid inlets allow a wide range of waveguide steering and by adapting the outlet part of the microfluidic channel stabilization of the liquid streams was obtained which could further improve the accuracy of light control. Fabricated in a single-layer photoresist, this integrated microflow system offers the novel possibility of continuously adapting on-chip light guidance, as successfully shown in this work.