Abstract
Optofluidic, lab-on-a-chip fluorescence sensors were fabricated using buried anti-resonant reflecting optical waveguides (bARROWs). The bARROWs are impervious to the negative water absorption effects that typically occur in waveguides made using hygroscopic, plasma-enhanced chemical vapor deposition (PECVD) oxides. These sensors were used to detect fluorescent microbeads and had an average signal-to-noise ratio (SNR) that was 81.3% higher than that of single-oxide ARROW fluorescence sensors. While the single-oxide ARROW sensors were annealed at 300 °C to drive moisture out of the waveguides, the bARROW sensors required no annealing process to obtain a high SNR.
Highlights
Research in optofluidics, which is the combination of microfluidics with the fields of integrated optics and photonics, has recently seen the design and testing of many new and useful integrated micro-scale devices [1,2]
This paper focuses on a new design for an anti-resonant reflecting optical waveguide (ARROW) fluorescence sensor, which is an optofluidic, lab-on-a-chip sensor using liquid-filled waveguides and capable of detecting the fluorescence of individual particles as they pass through a microscale excitation point
This paper reports on optofluidic fluorescence sensors that have been integrated with a buried ARROW design
Summary
Research in optofluidics, which is the combination of microfluidics with the fields of integrated optics and photonics, has recently seen the design and testing of many new and useful integrated micro-scale devices [1,2]. An aqueous solution, containing any fluorescent particles to be detected, flows through the hollow-core ARROW, where they emit an optical signal as they pass through the excitation point. ((aa)) IIlllluussttrraattiioonnooff tthhee bbaassiicc aannttii--rreessoonnaanntt rreefflleeccttiioonn ooppttiiccaall wwaavveegguuiiddee ((AARRRROOWW))bbiioosseennssoorr ddeessiiggnn..
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