Abstract

We report on a lab-on-chip sensor system based on integrated-optical resonators. The photonic components were realized in CMOS-process compatible amorphous silicon and the microfluidic interface enabling directed analyte transport was fabricated with soft-lithography technology. The developed sensor features optical resonators with dispersion engineered resonance spectra (DERS) to match optical resonance peaks over a wavelength region of several free spectral ranges. Resonance shifts caused by changes in refractive index of the investigated analyte are tracked by red-shifting a reference spectrum through the thermo-optic effect using electrical micro-heaters. With the DERS preserving the unambiguousness of the direct proportional relation between resonance shift and necessary heating power, this sensing principle enables direct electronic readout of analyte property changes. The sensor system therefore reduces the number and the size of peripheral devices usually necessary for the analysis of integrated optical devices, resulting in a broader range of potential application scenarios.

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