Abstract

AbstractNano- and hetero-structures of carbon nanotube (CNT) and indium tin oxide (ITO) can control significantly piezoelectric and optoelectronic properties in Microelectromechanical Systems (MEMS) as sensing and actuators under cyclic loading. Optimized preparation conditions were obtained for multi-functional purpose of the specimens by obtaining the best dispersion and turbidity in the solution. Optical transmittance and electrical properties were investigated for CNT and ITO dipping and spraying coating on boro-silicate glass and polyethylene terephthalate (PET) substrates by electrical resistance measurement under cyclic loading and wettability test. Uniform dipping coating was performed using Wilhelmy plate method due to it simple and convenience. Specimen was applied with spraying coating additionally. The change in the electrical and optical properties of coated layer is mainly dependent upon the number of dip-coating, the concentration of CNT and ITO solutions, and the surface treatment condition. Electric properties of coating layers were measured using four-point probe method, and surface resistance was calculated using a dual configuration method. Optical transmittance of CNT and ITO coated PET film was also evaluated using UV spectrum. Surface energy and their hydrophilic and hydrophobic properties of CNT and ITO coated substrates were investigated by wettability test via static and dynamic contact angle measurements. As the elapsing time of cyclic loading passed, the stability of surface resistance and thus comparative interfacial adhesion between coated layer and substrates was evaluated to compare the thermodynamic work of adhesion, Wa. As dip-coating number increased, surface resistance of CNT coating decreased, whereas the transmittance decreased step-by-step due to the thicker CNT and ITO networking layer. Nano- and hetero-structural effects of CNT and ITO solution on the optical and electrical effects have been studied continuously.

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