Abstract
SummaryOptical interfaces: Viewing into the vacuumThe requirements concerning in‐vacuum process diagnostics are more and more challenging. On the one hand, the setup itself has to be decoupled from the process to avoid any external impact on the process. On the other hand, the process parameters have to be in‐situ characterized and controlled by an in‐vacuum monitoring system. In the vicinity of these two contradictive requirements optical fiber applications gain more and more impact, since optical fibers cover several advantages: high transmission signal, inherent immunity against external electromagnetic forces, high durability and high mechanical as well as optical flexibility. The focus of the contribution is a new in‐vacuum optical temperature sensor combined with high‐temperature fiber optical feedthroughs. The sensor based on fiber Bragg gratings (FBG) in the optical fiber, which are extremely sensitive to temperature variations. In a first case study, the application of FBG with the feedthrough as an in‐vacuum optical temperature sensor is demonstrated. Thus an optical fiber containing a bunch of several FBG becomes a compact, robust, and flexible in‐vacuum network of local temperature sensors. Each individual sensor captures temperature variations over a signal path that is several km long with a remarkable accuracy up to 0.1 K and with speed of light.
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