Abstract
Diamond-like carbon (DLC) films with super hardness (>50 GPa) were deposited using Ar cluster ion beams at various oblique incident angles irradiated towards substrates on which C60 was simultaneously deposited. When the incident angles of Ar cluster ions were from 0° to 20°, the DLC films had a super hardness of approximately 50 GPa, the hardness three times higher than that of conventional DLC films. Furthermore, the films had a flat surface and a low sp2 content, which was estimated with a near edge X-ray absorption fine structure (NEXAFS). However, in the range of angles above 40°, the carbon films had a lower hardness, a rougher surface, and a higher sp2 content. Therefore, the incident angles of the Ar cluster ions for obtaining super hardness ranged from 0° to 20°.
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