Abstract
Optimum design considerations are presented for circular and square diaphragms on (100) and (110) crystal planes with p- and n-type four- terminal gauges in place of the conventional Wheatstone bridge construction Maximum output is obtained at the (100) circular diaphragm edge with a p- type gauge along a (011) direction at an angle of 45° The maximum output voltage of the circular diaphragm is 2 4 times as large as that of the square diaphragm It is found that the output voltage depends only on shear stress T` xy V out≌(ω/ɭ)π 66T` xyV s where V s is the supplied voltage, ω is the width of the gauge, ɭ is the length and π 66 is the piezoresistance coefficient
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