Abstract
The biosensors that work with field effect transistors as transducers and enzymes as bio-receptors are called ENFET devices. In the actual paper, a traditional MOS-FET transistor is cointegrated with a glucose oxidase enzyme, offering a glucose biosensor. The manufacturing process of the proposed ENFET is optimized in the second iteration. Above the MOS gate oxide, the enzymatic bioreceptor as the glucose oxidase is entrapped onto the nano-structured TiO2 compound. This paper proposes multiple details for cointegration between MOS devices with enzymatic biosensors. The Ti conversion into a nanostructured layer occurs by anodization. Two cross-linkers are experimentally studied for a better enzyme immobilization. The final part of the paper combines experimental data with analytical models and extracts the calibration curve of this ENFET transistor, prescribing at the same time a design methodology.
Highlights
Cointegration of metal oxide semiconductor (MOS) Transistor and Enzyme field effect transistors (ENFETs) are electronic devices that integrate in the same chip a FET with a sensitive enzymatic membrane for biorecognition purposes [1]
The glucose oxidase (GOx) enzyme was immobilized in a nafion agent [11]
Microphysical and chemical characterizations were performed on the nanostructured TiO2 film and on the glucose oxidase membrane with two kinds of crosslinkers
Summary
Cointegration of MOS Transistor and Enzyme field effect transistors (ENFETs) are electronic devices that integrate in the same chip a FET (field effect transistor) with a sensitive enzymatic membrane for biorecognition purposes [1]. ENFET fabrication is a complex interdisciplinary technology related to microelectronics [2], biochemistry [3], nanomaterials for biostructures, and biocompatibility [4]. Metal oxide semiconductor (MOS) downscaled technology has just reached its ultimate stage. As predicted by Moore [5], in 2021, we have just assisted in the glorious 2-nm node launching [6]. Predictions about the post-MOS era were issued. In 2011, the IEEE Chairman of the Electron Devices Society from Europe proposed the MOS diversification by its cointegration with other nanobiomaterials [7]. Many researchers have devoted large studies to biosensor cointegration, mainly with carbon nanotube CNT-FET or graphene FETs, especially for the femtomolar detection limit [8,9]
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