Abstract
Evanescent field sensors have shown promise for biological sensing applications. In particular, Silicon-on-Insulator (SOI)-nano-photonic based resonator sensors have many advantages for lab-on-chip diagnostics, including high sensitivity for molecular detection and compatibility with CMOS foundries for high volume manufacturing. We have investigated the optimum design parameters within the fabrication constraints of Multi-Project Wafer (MPW) foundries that result in the highest sensitivity for a resonator sensor. We have demonstrated the optimum waveguide thickness needed to achieve the maximum bulk sensitivity with SOI-based resonator sensors to be 165 nm using the quasi-TM guided mode. The closest thickness offered by MPW foundry services is 150 nm. Therefore, resonators with 150 nm thick silicon waveguides were fabricated resulting in sensitivities as high as 270 nm/RIU, whereas a similar resonator sensor with a 220 nm thick waveguide demonstrated sensitivities of approximately 200 nm/RIU.
Highlights
Introduction and backgroundSilicon photonic sensors have been extensively investigated for use as biosensors in fields such as basic medical research and diagnosis [1], bioterror detection [2,3], and smart home healthcare [4] diagnostics
We have investigated the optimum thickness of the waveguide core that results in the highest sensitivity for a strip waveguide resonator sensor
The results indicate that guided TM modes have higher sensitivities to the changes in refractive indices of the cladding media, since larger evanescent field component is traveling above the waveguide, where the target molecules exist
Summary
Silicon photonic sensors have been extensively investigated for use as biosensors in fields such as basic medical research and diagnosis [1], bioterror detection [2,3], and smart home healthcare [4] diagnostics Their small size, immunity to electromagnetic interference, sensitivity to adsorbed biomolecular layers at their surface, and compatibility with established, high volume CMOS foundry processes make them an attractive technology for lab-on-chip applications [5,6,7,8]. This value is within 90% of the maximum achievable sensitivity for a resonator sensor using strip waveguides
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