Abstract
Mn2+-doped Ba0.5Sr0.5TiO3 (BST) thin films were prepared on Pt-coated sapphire substrates by RF magnetron sputtering. By analyzing the energy state of particles during the sputtering, deposition parameters (substrate temperature, sputtering power, and atmosphere) were optimized for superior dielectric properties. Our results indicated that a compromise of relatively high tunability and low loss could be achieved. Resultant BST thin films has a tunability of 50% and dielectric loss of 0.64% at an applied field of 1.2 MV/cm, under optimized sputtering conditions of substrate temperature at 750 °C, pressure at 4 Pa with an O2/(O2+ Ar) mixing ratio of 50%, and sputter RF power density at 6.8 W/cm2.
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