Optimized growth and integration of silica nanowires into interdigitated microelectrode structures for biosensing

Abstract

Abstract Single step methodology has been developed and optimized for the integration of silica nanowires in interdigitated microelectrodes network. Silica nanowires were grown directly via Vapor-Liquid-Solid (VLS) process into interdigitated microelectrodes gap. Growth optimization was performed to determine an appropriate temperature and annealing time that would allow the dense nanowire growth between interdigitated structures and not compromise the physical/electrical structure of the microelectrode devices. The results indicate the optimum integration for growth at 1050 °C and 60 min. Finally, electrochemical impedance spectroscopy was used to determine the viability of using these nano–micro hybrid devices for biosensing. Electrochemical impedance spectroscopy results indicate a noticeable change in charge transfer (12,609 Ω) for chips with nanowires in comparison to chips without nanowires.