Optimized eight-inch extraction system for reactive ion beam etching

Abstract

A methodology of ion extraction system optimization is proposed, taking into account the influence of the ion density variation in plasma at the plasma sheath. Software tools for extraction grids design and machining have been developed, allowing compensation for the current, divergence, and deflection of a single beamlets. Simulation was used to predict the properties of the three-grid single beamlet. The measurement of the radial ion saturation current density distribution in plasma using a double Langmuir probe for an axial magnetic field up to 16 mT, vacuum chamber pressure ranging from 4×10−5 to 2×10−3 and rf power from 100 to 900 W has been performed. These distributions were used to calculate the grid compensation functions. An extraction system was optimized for the reference magnetic field in the air coil B=7.20 mT, vacuum chamber pressure p=2.0×10−4 mbar, rf power Prf=500 W, and net acceleration voltage Vnet=300 V with argon as a working gas. The ion current density distributions for optimized and nonoptimized extraction systems have been measured and compared with predictions of the model. A maximum detectable variation in the ion current density across the 8 in. target can be reduced to < 3%.