Abstract
This study is geared toward the optimization of plasma processes through machine learning (ML) based on a regression algorithm. The ML approach has also enabled us to tune the parameters of plasma distribution. As the contribution rate for parameters can be calculated, ML offers the possibility of principal component analysis for a new process window.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
