Abstract
The magnetic properties of Iongitudinal magnetic recording media with Co-Cr alloy films deposited by facing targets sputtering (FTS) were investigated. These properties are dependent on sputtering conditions such as the argon gas pressure, substrate temperature, and alloy composition of the underlayer of the magnetic film. In this study, the magnetic properties of Cr, Cr-Ta, and Cr-Co underlayers were analyzed in relation to the Ar gas pressure and substrate temperature. The magnetic properties of Co-C-Ta/Cr bi-layered films were also studies to determine the advantage of Ta addition. Consequently, the dependence of the magnetic properties on the sputtering conditions was systematically clarified for practical use in fabricating magnetic recording disks.
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