Abstract

Ultrasonic levitation bearings have lower load capacity and stiffness than other non-contact bearings, which restricts their practical use. This study proposes a method to improve the load characteristics of the bearings by adding microstructure on the rotor surface. The effects of different microstructure shapes, sizes, and quantities on the bearing load capacity and stiffness were investigated, and the mechanism of how the microstructures and their parameters affect the bearing static performance was revealed by analyzing the air film pressure field analysis of the bearing. Using the groove microstructure as an example, an optimization design was carried out to maximize the load capacity and stiffness of the ultrasonic levitation bearing, and the validity of this optimization was verified by the experiment.

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