Abstract
Highly transparent conductive composite electrodes made of multilayer of TiO2 and Cu (TiO2/Cu/ TiO2) thin films (30/3‐9/30nm thick) are deposited onto flexible substrates at room temperature. The micro-structural, optical and electrical properties of the multilayer are studied with the use of atomic force microscopy, uv-visible spectrophotometry and Hall measurement tool. The Haacke figure of merit (FOM) has been calculated to evaluate the performance of the multilayer films. The highest FOM achieved is 6.4 ×10 −3 � −1 for a Cu thickness of 6 nm with a sheet resistance of 19 � /sq and an average transmittance of 81%.
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