Optimization of three-dimensional traveling wave drive for a PZT thin-film micro-motor based on stiffness tuning of the supporting structure

Abstract

This paper is based on the analysis of the three-dimensional motion of the PZT (lead zirconate titanate) thin-film traveling wave micro-motor and presents an optimization study of the effect of the radial component on the output torque and maximum speed. Based on theoretical analysis, it is proposed that the inconsistency of the equivalent constraint stiffness of the inner and outer rings is the main factor in the radial component of the traveling wave drive. Considering the large computational and time costs of 3D (three-dimensional) transient simulation, the residual stress-relieved deformation state in a steady state is used to equivalently characterize the inner and outer ring constraint stiffness of the micro-motor, and then the outer ring support stiffness is adjusted to achieve the consistency of the inner and outer ring constraint stiffness and the optimization of the radial component reduction, as well as to improve the flatness of the micro-motor interface under residual stress and optimize the contact state between the stator and rotor. Finally, performance testing of the device prepared by the MEMS process showed that the output torque of the PZT traveling wave micro-motor increased by 21% (14.89 μN*m), the maximum speed increased by 18% (>12000 rpm), and the speed instability was optimally reduced by a factor of 3 (<10%).