Abstract
An all solid-state-microbattery is defined as a stack of thin layers (5-20µm) including the active part, protective layers and current collectors. [1] In this work, the stack Li/LiPON/TiOS is studied. Titanium oxysulfide thin films (TiOySz) are used as positive electrode material. This material was selected because of their specific potential (reversibly insert of lithium below 3V vs. Li+/Li) well adapted for the considered application. Capacity of 100µA.h/cm2/µm can be reached. Correlation between microstructure, chemistry and performance of the active material is reported.
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