Optimization of the geometry of the reactor inductance coil for reactive-ion etching by modeling in the COMSOL Multiphysics software package

Abstract

The work aims to optimise the geometry of the inductor of a reactive-ion etching reactor using the COMSOL Multiphysics package, including the calculation of the electron temperature, density, and electric potential of a plasma. A “fine” finite element mesh was used with a minimum finite element size (8.6·10−5) m in the simulation. It was shown that to obtain a high density plasma with a high electric potential and electron temperature, it is necessary to use an inductor with fewer turns.