Abstract
A technique for optimizing the geometric parameters of the molecular stage of a turbo molecular vacuum pump with helical channels made on the rotor is considered. In the axial section of the rotor, the channels have a rectangular shape. As a result of numerical experiments by the Monte Carlo method in the molecular gas flow regime, the influence of each geometrical parameter of the rotor on the main pumping characteristics of the molecular stage was established. The developed program makes it possible to optimize the geometric parameters of the helical channels of the molecular stage for given overall dimensions of the rotor in order to obtain the maximum speed of action and pressure ratio.
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