Abstract

We have described the results of numerical investigations of different versions of a three-electrode elementary slit cell for the formation a hydrogen ion beam with a relatively low energy and a high emission current density. The version of the cell chosen from the results of these investigations makes it possible to obtain a hydrogen atom beam with an energy of 15 keV, an ion current density of ~500 mA/cm2, and an angular divergence of 24 mrad.

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