Abstract

In the present paper we study few designs of travelling-wave electrodes for electro-optic modulator based on quantum confined Stark effect and discuss advantages of radio frequency (RF) electrodes optimization. Using benzocyclobutene (BCB) layers under coplanar strips, as well as longitudinal trenches in InP substrate and combination of these techniques, we could control effectively specific capacitance of external RF electrodes. It was shown that lowering of specific capacitance could give potential opportunity to decrease electro-optic modulator half-wave voltage, as well as to control the phase velocity of electrical signal or decrease the length of modulator.

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