Abstract
AbstractDue to their excellent piezoelectric properties, PZT ceramics are attractive materials for many MEMS applications. By depositing a PZT film on a micro-machined platinized silicon substrate, membranes can be actuated in the flexural mode. In this work, 2D arrays of PZT actuated membranes, which can be used as ultrasonic transducers, have been designed, fabricated, and tested for their ferroelectric response. The device behavior was also modeled using FEA. Data from FEA runs were used to evaluate the device performance based on its effective coupling coefficient (efficiency), acoustic impedance, and resonance frequency. Results show that the device-coupling factor is significantly affected by the PZT and silicon layers' thickness and the top electrode configuration. Results also indicate a considerable flexibility in optimizing the device performance under a wide range of operational requirements, which makes such devices attractive for different applications.
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