Abstract
A ring-shaped piezoelectric resonator was proposed for health monitoring. The proposed ring-shaped resonator is comprised with a multilayer of Pt/Ti/PZT/Ti/Pt/SiO2, deposited on the silicon-on-insulator wafer and expected to be a contour mode. The ring-shaped resonator reacts to certain voltage vibration with a mass perturbation to get eigenstate vibration or frequency shifts which could be transferred to electrical signals by piezoelectric effect. In this paper, vibration modes with high frequency shift due to a small mass perturbation of 0.74 ng are analyzed. It is found that the relatively lower displacement at the support can be obtained, and the desirable vibration can be reproduced with two eigenstate modes.
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