Abstract
This paper investigates the improvement in selectivity by means of applying a physical gas filter. Looking for a selective and highly sensitive hydrogen sensor, various filter systems, single, dual and buried filter systems, were deposited on top of a basic high-temperature semiconducting Ga 2O 3 thin film sensor. Sensor respondence on a big variety of gases present in domestic ambience and especially hydrogen and ethane, which is the hardest test on cross sensitivity, is shown. Using a single filter SiO 2 layer a selective hydrogen sensor is realized, which is able to detect 50 ppm hydrogen at an operation temperature of 700°C in humid air without any interference caused by other gases. Dual SiO 2/metal oxide filter systems and buried metal oxide layer filters show behaviors varying from selective ethane to selective hydrogen detection.
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