Abstract
Abstract : The material properties of sol-gel lead zirconate titanate (PZT) are inherently linked with its crystallinity and texture. The use of seed layers and control of the base metal crystal structure ultimately controls the ferroelectric and piezoelectric properties of the thin film. This effort attempted to transfer the PbTiO3 seed layer fabrication process that has been recently accomplished at Pennsylvania State University under a fiscal year 2007 (FY07) Army Research Office - Short Term Innovative Research (ARO-STIR) project to the U.S. Army Research Laboratory (ARL). Characterization included x-ray diffraction and ferroelectric, dielectric, and piezoelectric properties of the PZT thin films and PZT actuators fabricated using the ARL piezomicroelectromechanical systems (MEMS) switch fabrication process.
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