Abstract
Criteria are provided for the selection of various matched spatial filter (MSF) synthesis parameters: the bias exposure (E(B)); beam balance ratio (K); and spatial frequency band (f*) in which K is set. The signal-to-noise ratio (SNR) and peak intensity (I(p)) of the output correlation are used as measures of optimum correlation and a diffraction pattern sampling unit is used to insure reliable and reproducible data.
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