Abstract

Ionized gas sensors using nano materials show good sensitivity to gases. Therefore, the nano material structure has a great impact on the performance of sensors. However, the current researches have mainly focused on the influence of nanostructure on field enhancement factors without considering the gas discharge process in space. Therefore, these methods are not suitable for the research of ionized gas sensors. In this paper, a fluid model is established based on the principle of gas discharge. It consists with mass conservation equation, energy conservation equation, and Poisson equation. The influence of electrode separation, screening effects and nanostructure on the cathode current density was analyzed compared with the field enhancement factor. We not only discussed the influence of nanomaterial morphology, but also considered the influence of nanomaterial quantity on gas discharge, which made the research results somewhat different from the previous ones. The experimental results show that the simulation results obtained by the established model can correctly reflect the discharge characteristics of the ionized gas sensor. The methods and results presented in this paper are expected to be applied to the design of device based on gas discharge.

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