Abstract
In this work, we analyze and optimize an optical biochemical sensor using silicon multiple-slot waveguides. The rigorous optimization procedure considers parameters such as ridge width, slot width, the number of slots, and the effect of residual silicon left at the bottom of the slot region. These parameters are then optimized using a figure of merit to achieve the highest possible sensitivity to bulk and surface changes in the upper cladding of the sensor. The multiple-slot structure is then studied in a bend configuration in order to construct ring-resonator-based sensors. A bulk sensitivity of 912nm/refractive index unit is achieved for a change in bulk refractive index, which is three times better than single-slot waveguides.
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